| Model Number | XM04A-S1 |
|---|---|
| Mirror Model Number | XM04A-S1-R |
| Table Size | 40mm×40mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ± 3.25mm |
| Straightness | ≦2.0μm/6.5mm |
| Minimum Readout | 10μm |
| Moment Load Stiffness | 0.82 arcsec/N・cm |
| Load Capacity | 39.2N (4kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 0.1kg |
| Perpendicularity | - |
| Actuator | Micrometer (6.5mm) |
| Lubricant Change Option | |
|---|---|
| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |